Turbo Pumps
Turbo-V 3K-G
The Agilent high throughput turbomolecular pump, Turbo-V 3K-G, is a dedicated vacuum pumping system, designed specifically as a turbo pump for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of Argon under high temperature load.
This robust turbo pump is suitable for harsh manufacturing environments because of its rugged design. Typical industrial vacuum coating applications include physical vapor deposition (PVD), solar and flat panel display manufacturing.
The pump's robust design and its advanced integrated electronics make the Agilent Turbo-V 3K-G the optimum pumping solution for the vacuum coating industry.
Features
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Pumping speed:
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N2: 2200 l/s
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He: 1900 l/s
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Ar: 2050 l/s
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Compression ratio:
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N2: > 1 x 107
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He: 6 x 103
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Ar: > 1 x 108
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Base pressure* (with recommended forepump)
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<1 x 10-8 mbar
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Inlet flange
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ISO 250F
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Foreline flange
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KF 40 NW
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Nominal rotational speed
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31,800 rpm
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Start-up time without gas load and with the recommended forepump
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<6 minutes
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Foreline pressure
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< 0.5 mbar
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Minimum Recommended forepump
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> 60 m3/h (depending on gasflow requirements)
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Operating position
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Any
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Cooling requirements
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Water
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Weight ISO (250)
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52 kg (114.63 lbs)
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| Description | Part number |
| Turbo-V 3K-G ISO 250 F system with integrated purge/vent valves | 9698888 |
| Turbo-V 3K-G T ISO 250 F with ProfiBus and integrated purge/vent valves | 9698889 |
| Mains cable NEMA Plug, 3m long | 9699958 |
| Mains cable European Plug, 3m long | 9699957 |
| Serial cable and A-PLUS Software | 9699883 |
| Inlet screen DIN ISO 250 | 9699350 |
| Protocol Converter RS-232 <-> RS-485 wire | 9699258 |
| Centering ISO 250 | 9699144 |
| Water cooling kit for 6x8 (IDxOD) flexible tube (plastic model) | 9699348 |
| Water cooling kit for 3/8 in. ID flexible tube (metallic model) | 9699338 |
| Turbo-V Remote Panel | 9698850 |
| IP-54 accessory kit – Type 1 | 9698960 |
| Exchange Turbo-V 3K-G ISO 250 F system with integrated purge/vent valves | EX9698888 |
| Exchange Turbo-V 3K-G T ISO 250 F with ProfiBus and integrated purge/vent valves | EX9698889 |
