Integration Type
HELIOT ZERO
ULVAC
Detectable gas | Helium |
Vacuum method detection range | 10-12 to 10-3 Pa・m3/s (*1) |
Sniffer method detection range | 10-8 to 10-3 Pa・m3/s、0.1 to 1000 ppm |
*1 With 30L/m rotary pump. Sensitivity range change by usage.