7. An aux.pump in oil-free pumping system
8. Used in enclosing room in sem-conductor fab. equipments
9. An aux.pump in electron miscrope
10. Used in IC equipment
Technical Features:
Invulnerable to exterior dust contamination;
Interior oil-free, clean vacuum assured;
Smooth running, low noise;
Water cooling unneeded, corrosion-proof;
Easy operation, low maintenance expense;
Item | Technical Specifications (50hz) | |||
Model | EVP-300 | EVP-600 | EVP-1000 | |
Nominal capacity | 4 L/s | 8 L/s | 16 L/s | |
Ultimate pressure | 3Pa | 3Pa | 3Pa | |
Water vapor treatment capacity (gas ballast open) | 25g/day | 25g/day | 25g/day | |
Motor Data | 0.55KW | 0.75KW | 1.5KW | |
Rotary speed | 1450rpm | 1450rpm | 1450rpm | |
Temperature | 5~40℃ | |||
Noise | <65dB | <65dB | <68dB | |
Noise (gas ballast) | <70dB | <70dB | <74dB | |
Gas inlet | KF25 | KF40 | KF40 | |
Gas outlet | KF25 | KF25 | KF40 | |
Dimension | 470X270X364 | 490X340X370 | 560X390X420 | |
(LXWXH) | (mm) | |||
Weight | 35Kg | 44Kg | 64Kg |