Measuring Range (H)
20 – 115 μm
0.8 – 4.5 mils
Measuring Range (Rt)
10 – 115 μm
0.4 – 4.5 mils
Minimum Roughness (Ra)
2 μm
0.08 mil/80 μin
Accuracy (H)
± 5 μm
± 0.2 mils
Accuracy (Rt)*
± (5 μm + 5%)
± (0.2 mils + 5%)
Accuracy (Ra)*
Anvil Pressure
± (0.01 mils + 5%)
± (0.25 μm + 5%)
Anvil Size
110 grams-force
Field of View
1.1 Newtons
Ø0.25 inch
Lateral Sampling
Vertical Resolution
0.149 x 0.149 inch
Ø6.35 mm
Measuring Range (H)
0.145 mils
Resolution
3.8 x 3.8 mm
3.93 μin - 2D/3D, 0.393 μin - SDF
3.7 μm
100 nm - 2D/3D, 10 nm - SDF
0.01 mils
0.1 μm