Mô tả
With respect to the final pressure different pumps are available:
- Single-step rotary piston pump for a max. final pressure of approx. 20 mbar.
- Two-step rotary piston pump for a max. final pressure of approx. 10-2 mbar.
- Pump system PT70 Dry (rotary vane pump with following turbomolecular pump for a max. final pressure of 10-5 mbar.
Information:
For protection of the vacuum pump only cold stage evacuation is allowed. The reduction of working tube strengthness limits the max. possible working temperature under vacuum.
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