■Corrosive resistant type for corrosive gases.
■Durable structure for air inrush.
■Sturdy, resists external impacts.
■Serial communication
※RS232C Serial interface
■Conforms to recognized safety standard
NRTL / SEMI-S2 / CE
Specification:
■Semiconductor production
■Electronics gun exhaust, ionization source exhaust
■FPD manufacturing
■Surface treatment, surface modification
■Manufacture of various electronic components
■Lamp production, optical components production
■Accelerating device, radiation facility, nuclear fusion research
■Heat treatment
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