Mahr Metrology - CWM 100

3D optical measurement system – confocal microscope with integrated white light interferometer – for measurement and evaluation of surface structures and small components

• High precision - non-contact measurement of surface structures
• Your results are correct!
• Fast measurement - short measuring time

• For measurements on technical, optical and reflecting surfaces as well as on printed circuit boards (semiconductor industry) a 3D topographical analysis (areal measurement) with high information density is required. Soft and thin-walled materials also require non-contact measurement. Moreover, ever higher levels of surface quality are being achieved, greatly increasing the requirements placed on measuring systems in terms of resolution and measuring accuracy.
• Highly accurate and non-conatct measurement of surface structures.
• High precision with sub-nanometer resolution
• Main application field for the confocal sensor is the measurement of rough and dark surface structures and small components.
• Main application field for the white light interferometer is the measurement of fine, polished and shiny surface structures including glass and optical surfaces
• Microscope field of view, easily enlargeable by fully automated stitching procedure