Mô tả
The Turbo-V 551 Navigator turbomolecular vacuum pump with MacroTorr drag technology delivers high compression ratios, high throughput, and high discharge pressures for a wide-range of high vacuum applications. The unique bearing and permanent dry lubrication in the V 551 eliminate oil and maintenance, and permit operation of the pump in any orientation. Agilent (formerly Varian) offers the V 551 with Navigator on-board controllers with integrated electronics, or with standard rack controllers for simple installation. The Turbo-V 551 is available for sale in system packages with controller, inlet screen, and power cables included, or as stand-alone pumps. A version optimized for scanning electron microscopes produces minimal vibration and the lowest magnetic signature available.
Pumping Speed
CFF 6”
CFF 8” or ISO 160 |
N2
350l/s
550l/s |
He
450l/s
600l/s |
H2
450l/s
510l/s |
Compression Ratio |
1 x 109 |
1 x 107 |
1 x 106 |
Base pressure (with recommended forepump) |
<1 x 10-10 mbar (<1 x 10-10 Torr) |
Inlet Flange Options |
CFF 6”; CFF 8”; ISO 160; ISO 160-F bolted |
Foreline Flange |
KF25 |
Rotational Speed |
42,000 rpm |
Start-up Time |
<5 minutes |
Recommended Forepumps |
Agilent TS300 Dry Scroll Pump;
Agilent DS-302 Rotary Vane Pump |
Operating Position |
Any |
Cooling Requirements |
Natural air convection;
Water optional (use water with electrical conductivity = 500 µS/cm) |
Bakeout Temperature |
120oC at inlet flange, maximum (CF Flange);
80oC at inlet flange, maximum (ISO Flange) |
Vibration Level (displacement) |
<0.01 µm at inlet flange |
Weight, kg (lbs) |
ISO Flange: 19.4 (43.0);
CF and ISO Bolted Flange: 23.4 (51.6) |
Product Numbers:
9698922
9698944
9698925
9698923
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